Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography
نویسندگان
چکیده
منابع مشابه
Chiral microstructures (spirals) fabrication by holographic lithography.
We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized side beams and a circular polarized central beam. The pitch and separation of the spirals can be varied by changing the angle between the side beams and the ...
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2009 WILEY-VCH Verlag Gmb Considerable research has been carried out on photonic crystals since the concept was introduced in 1987. However, fabrication of high-quality 3D photonic crystals still remains a challenge. Among a wide range of proposed techniques, creation of large-area, defect-free 3D polymeric templates through multibeam interference lithography, direct laser writing, or direct in...
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The fabrication of true three-dimensional (3D) microstructures both rapidly and economically over a large area with negligible defects is attractive for a wide range of applications. In particular, multi-beam interference lithography is one of the promising techniques that can mass-produce polymeric 3D photonic crystals defectfree over a large area. This review discusses the relationship betwee...
متن کاملInterference Lithography
Interference lithography (IL) is the preferred method for fabricating periodic and quasi-periodic patterns that must be spatially coherent over large areas. IL is a conceptually simple process where two coherent beams interfere to produce a standing wave, which can be recorded in a photoresist. The spatial-period of the grating can be as fine as half the wavelength of the interfering light, all...
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Soft lithography offers a convenient set of methods for the transfer of patterns to planar and nonplanar substrates. Microelectrodeposition can transform thin metal patterns into self-supporting microstructures, weld components together, and strengthen microstructures after deformations. Together, soft lithography and electrochemistry provide synergistic technologies and the basis for a strateg...
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ژورنال
عنوان ژورنال: Journal of Macromolecular Science, Part C: Polymer Reviews
سال: 2005
ISSN: 1532-1797,1520-5746
DOI: 10.1080/15321790500304163